Fabrication and Characterization of a Microscale Piezoelectric Vibrator Based on Electrohydrodynamic Jet Printed PZT Thick Film

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Electrohydrodynamic jet printing of PZT thick film micro-scale structures

Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian University of Technology, Dalian, 116024, China Key Laboratory for Precision and Non-traditional Machining Technology of Ministry of Education, Dalian University of Technology, Dalian, 116024, China College of Electronic Science and Technology, Dalian University of Technology, Dalian, 116024, China Cranfield Univer...

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ژورنال

عنوان ژورنال: Micromachines

سال: 2021

ISSN: 2072-666X

DOI: 10.3390/mi12050524